The 62nd JSAP Spring Meeting 2015
Session ID : 13a-A24-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 62
Location : [in Japanese]
Date : March 11, 2015 - March 14, 2015
Fabrication and Evaluation of SiO2/Si Structures by Kr/O2 Plasma Oxidation at Low Temperature
Details
Article 1st page
