The 62nd JSAP Spring Meeting 2015
Session ID : 12a-A29-10
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 62
Location : [in Japanese]
Date : March 11, 2015 - March 14, 2015
Investigation of Relationship between Crystallization Speed and Off Current of TFT Fabricated by Atmospheric Pressure Micro-Thermal-Plasma-Jet Crystallized Germanium Film
*Taichi Nakatani, Shohei Hayashi, Seiji Morisaki, Shogo Yamamoto, Seiichiro Higashi
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