The 62nd JSAP Spring Meeting 2015
Session ID : 12a-A29-11
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 62
Location : [in Japanese]
Date : March 11, 2015 - March 14, 2015
Fabrication and Demonstration of CMOS Inverter and Ring Oscillator Composed of Ultra-Thin Body Poly-Ge p- and n-MISFETs for Stacked Channel 3D-IC
*Yoshiki Kamata, Masahiro Koike, Etsuo Kurosawa, Masashi Kurosawa, Hiroyuki Ota, Osamu Nakatsuka, Shigeaki Zaima, Tsutomu Tezuka
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