The 62nd JSAP Spring Meeting 2015
Session ID : 13p-P17-16
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 62
Location : [in Japanese]
Date : March 11, 2015 - March 14, 2015
Effects of dry etching on Al2O3/AlGaN/GaN MOS interface properties
Details
Article 1st page
