The 62nd JSAP Spring Meeting 2015
Session ID : 13p-D4-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 62
Location : [in Japanese]
Date : March 11, 2015 - March 14, 2015
Local Composition Analysis of Ternary Compound Semiconductors by Selective Area Metal Organic Chemical Vapor Deposition in Narrow Trenches
*Daisuke Ohba, Yoshiyuki Kondo, Isao Gunji, Yoji Iizuka, Masakazu Sugiyama, Shigetoshi Hosaka
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