JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 76th JSAP Autumn Meeting 2015
Session ID : 15p-1C-8
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Fabrication and Comparative Study of Polycrystalline and Crystalline Silicon Channel FinFET CMOS Inverters
*Yongxun LiuYouhei HoriMorifumi OnoTakashi MatsukawaKazuhiko EndoShinichi OuchiJunichi TsukadaHiromi YamauchiYuki IshikawaWataru MizubayashiYukinori MoritaShinji MigitaHiroyuki OtaMeishoku Masahara
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© 2015 The Japan Society of Applied Physics
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