The 76th JSAP Autumn Meeting 2015
Session ID : 15p-1C-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 76
Location : [in Japanese]
Date : September 13, 2015 - September 16, 2015
GIDL of FinFETs caused by extension ion implantation
*Takashi Matsukawa, Yongxun Liu, Shintaro Otsuka, Takahiro Mori, Yukinori Morita, Shinichi O'uchi, Hiroshi Fuketa, Shinji Migita, Meishoku Masahara
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