JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 63rd JSAP Spring Meeting 2016
Session ID : 21p-H103-21
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High-deposition rate reactive sputtering for Nickel compounds, which have electro-chromic properties, making use of water vapor
*Akira NaraiHiroki WakamatsuShyun YamauchiToshihiro KugimiyaYoshio Abe
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© 2016 The Japan Society of Applied Physics
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