The 63rd JSAP Spring Meeting 2016
Session ID : 21p-H103-21
Conference information
Host:
The Japan Society of Applied Physics
Name :
JSAP Spring Meeting
Number :
63
Location :
[in Japanese]
Date :
March 19, 2016 - March 22, 2016
High-deposition rate reactive sputtering for Nickel compounds, which have electro-chromic properties, making use of water vapor