The 63rd JSAP Spring Meeting 2016
Session ID : 19p-P6-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 63
Location : [in Japanese]
Date : March 19, 2016 - March 22, 2016
Formation of amorphous silicon nitride by electron-beam induced reaction combined with low-temperature tunneling reactions of H atoms with solid SiF4 films
Details
Article 1st page
