The 63rd JSAP Spring Meeting 2016
Session ID : 22a-W611-1
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 63
Location : [in Japanese]
Date : March 19, 2016 - March 22, 2016
ITO thinfilms fabricated by hybrid facing-target sputtering
*Shinichi Morohashi, Tsujita Keisuke, Tanimoto Tsukasa, Harada Naoyuki, Murata Takuya
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