The 63rd JSAP Spring Meeting 2016
Session ID : 22a-W541-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 63
Location : [in Japanese]
Date : March 19, 2016 - March 22, 2016
Electrical Characterization of SiO2 / GaN Vertical MOS Capacitor treated by High Pressure Water Vapor Annealing
*Yuta Tominaga, Ueno Katsunori, Koji Yoshitsugu, Tada Yuki, Yasuaki Ishikawa, Yukiharu Uraoka
Author information
Keywords:
22a-W541-8,
GaN
Details
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