The 63rd JSAP Spring Meeting 2016
Session ID : 22a-W541-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 63
Location : [in Japanese]
Date : March 19, 2016 - March 22, 2016
Suppression of isolation leakage current in AlGaN/GaN HEMTs by neutral-beam etching
*Fuyumi Hemmi, Cedric Thomas, Yi-Chun Lai, Akio Higo, Alex Guo, Shireen Warnock, Jesus A. del Alamo, Seiji Samukawa, Taiichi Otsuji, Tetsuya Suemitsu
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