JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 63rd JSAP Spring Meeting 2016
Session ID : 21p-H112-4
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Effects of Si Gas Flow on Si Adsorption Sites of GaAsN Films Grown by Atomic Layer Epitaxy
*yuki yokoyamaMasaru HorikiriTomohiro HaraguchiToshihiro YamauchiHidetoshi SuzukiTetsuo IkariAtsuhiko Fukuyama
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© 2016 The Japan Society of Applied Physics
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