JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 63rd JSAP Spring Meeting 2016
Session ID : 20p-H121-10
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Lateral satellite peaks originating from confined misfit dislocations in HRXRD study of AlN layer grown on step-height-controlled SiC substrates
*Mitsuaki KanekoTsunenobu KimotoJun Suda
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© 2016 The Japan Society of Applied Physics
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