The 63rd JSAP Spring Meeting 2016
Session ID : 21p-P10-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 63
Location : [in Japanese]
Date : March 19, 2016 - March 22, 2016
Effects of nitrogen doping in 4H-SiC by laser ablation of a SiNx film and its diffusion mechanism
*Ryota Kojima, Hiroshi Ikenoue, Masaru Suwa, Akihiro Ikeda, Daisuke Nakamura, Tanemasa Asano, Tatsuo Okada
Author information
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