JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 63rd JSAP Spring Meeting 2016
Session ID : 20p-S322-17
Conference information

Host: The Japan Society of Applied Physics

Name : JSAP Spring Meeting

Number : 63

Location : [in Japanese]

Date : March 19, 2016 - March 22, 2016

Development of monitoring method for morphology change of metal thin film using antenna transmission non-contact piezoelectric sensor
*Yuichiro Shiraiwa, Shun Hashizato, Nobutomo Nakamura, Hirotsugu Ogi, Masahiko Hirao
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Keywords: 20p-S322-17, metal thin film, morphology change, monitoring
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© 2016 The Japan Society of Applied Physics
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