The 77th JSAP Autumn Meeting 2016
Session ID : 13a-D61-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 77
Location : [in Japanese]
Date : September 13, 2016 - September 16, 2016
Systematic Study of the Response of Resist Materials Based on Noria Derivatives Modified with Various Protection Ratios of Acetal Moieties to Electron Beam Irradiation
Details
Article 1st page
