The 77th JSAP Autumn Meeting 2016
Session ID : 15a-B10-1
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 77
Location : [in Japanese]
Date : September 13, 2016 - September 16, 2016
Study on the Si deposition process in Atmospheric-Pressure Plasma for application to low-temperature thin film transistors
*Shogo Tamaki, Koji Terawaki, Yuichiro Kimoto, Kohei Kamada, Hiromasa Ohmi, Hiroaki Kakiuchi, Kiyoshi Yasutake
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