JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 77th JSAP Autumn Meeting 2016
Session ID : 15p-B10-14
Conference information

Host: The Japan Society of Applied Physics

Name : JSAP Autumn Meeting

Number : 77

Location : [in Japanese]

Date : September 13, 2016 - September 16, 2016

Formation of porous SiO2 films by F2-laser deposition
*Takuya Toma, Akira Suwa, Daisuke Nakamura, Hiroshi Ikenoue
Author information
Keywords: 15p-B10-14, SiO2, laser processing
CONFERENCE PROCEEDINGS FREE ACCESS

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© 2016 The Japan Society of Applied Physics
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