The 77th JSAP Autumn Meeting 2016
Session ID : 15p-B10-15
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 77
Location : [in Japanese]
Date : September 13, 2016 - September 16, 2016
Evaluation of Depth-dependent Interface States at TSV-liner SiO2 Using Multi-well Structured TSV
*Yohei Sugawara, Hisashi Kino, Takafumi Fukushima, Kang-Wook Lee, Mitumasa Koyanagi, Tetsu Tanaka
Author information
Details
Article 1st page
