The 77th JSAP Autumn Meeting 2016
Session ID : 16a-B10-5
Conference information
Host:
The Japan Society of Applied Physics
Name :
JSAP Autumn Meeting
Number :
77
Location :
[in Japanese]
Date :
September 13, 2016 - September 16, 2016
Low contact resistance in metal/n-Ge junctions by inserting W-germanide films synthesized by thermal chemical vapor deposition