The 77th JSAP Autumn Meeting 2016
Session ID : 13p-A21-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 77
Location : [in Japanese]
Date : September 13, 2016 - September 16, 2016
Effect of Oxygen on Polarity and Crystalline Quality of AlN Films Deposited by Pulsed DC Reactive Sputtering
Details
Article 1st page
