JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 77th JSAP Autumn Meeting 2016
Session ID : 13p-A21-3
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Development of n-type doping technique for GaN by pulsed sputtering
*Kohei UenoYasuaki ArakawaHideyuki ImabeppuAtsushi KobayashiJitsuo OthaHiroshi Fujioka
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Keywords: 13p-A21-3, GaN, Sputtering
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© 2016 The Japan Society of Applied Physics
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