Effect of Oxygen on Polarity and Crystalline Quality of AlN Films Deposited by Pulsed DC Reactive Sputtering

The 77th JSAP Autumn Meeting 2016

セッションID: 13p-A21-2

会議情報

主催: The Japan Society of Applied Physics

会議名: 応用物理学会秋季学術講演会

回次: 77

開催地: 朱鷺メッセ

開催日: 2016/09/13 - 2016/09/16

Effect of Oxygen on Polarity and Crystalline Quality of AlN Films Deposited by Pulsed DC Reactive Sputtering

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