JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 77th JSAP Autumn Meeting 2016
Session ID : 13p-A21-5
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Improvement of reproducibility of MOMBE GaN using in-situ low-pressure nitrogen microplasma treatment
*yasuhiro kusakabeTakahiro MaruyamaKazuo ShimizuShigeya Naritsuka
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Keywords: 13p-A21-5, GaN, MOMBE
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© 2016 The Japan Society of Applied Physics
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