JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 77th JSAP Autumn Meeting 2016
Session ID : 15a-A23-2
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Dynamic modeling of melting process and carbon contamination in packed Si chunks of Czochralski silicon crystal growth
*Xin LiuSatoshi NakanoKoichi Kakimoto
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© 2016 The Japan Society of Applied Physics
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