The 64th JSAP Spring Meeting 2017
Session ID : 14p-423-11
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 64
Location : [in Japanese]
Date : March 14, 2017 - March 17, 2017
Complex and Deepening OPC (Optical Proximity effect Correction) : High Speed Writing Data Processing by GPGPU and Reduction of OPC Placements by Quadruple Pattern Technology
Keywords:
14p-423-11,
Optical Proximity effect Correction,
Mask data processing,
Computational litography
Details
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