The 64th JSAP Spring Meeting 2017
Session ID : 14p-423-12
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 64
Location : [in Japanese]
Date : March 14, 2017 - March 17, 2017
Homogenization of Patterning Characteristics in an Exposure Field of Projection Lithography Using a Gradient-Index Lens Array
Details
Article 1st page
