The 64th JSAP Spring Meeting 2017
Session ID : 15p-P11-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 64
Location : [in Japanese]
Date : March 14, 2017 - March 17, 2017
Silicide nanocrystal formation in Mg ion implanted Si
Keywords:
15p-P11-5,
ion implantation
Details
Article 1st page
