The 64th JSAP Spring Meeting 2017
Session ID : 17a-313-4
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 64
Location : [in Japanese]
Date : March 14, 2017 - March 17, 2017
Study on properties of hydrofluorocarbon gas plasma and etch performances of dielectric films
*Naoki Takeda, Yan Zhang, Toshio Hayashi, Makoto Sekine, Keigo Takeda, Hiroki Kondo, Kenji ishikawa, Masaru Hori
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