The 64th JSAP Spring Meeting 2017
Session ID : 16a-E206-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 64
Location : [in Japanese]
Date : March 14, 2017 - March 17, 2017
Through silicon via etching with high-speed gas-switching Bosch process using minimal ICP deep trench etcher (II)
*Hiroyuki Tanaka, Hisato Ogiso, Shizuka Nakano, Yoshiyuki Nozawa, Toshihiro Hayami, Sommawan Khumpuang, Shiro Hara
Author information
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