The 64th JSAP Spring Meeting 2017
Session ID : 17a-301-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 64
Location : [in Japanese]
Date : March 14, 2017 - March 17, 2017
Thermal oxidation simulation of 4H-SiC by charge-transfer type molecular dynamics
*So Takamoto, Takahiro Yamasaki, Takahisa Ohno, Chioko Kaneta, Satoshi Izumi, Shinsuke Sakai
Author information
Keywords:
17a-301-5,
molecular dynamics,
oxidation simulation,
charge-transfer type interatomic potential
Details
Article 1st page
