The 64th JSAP Spring Meeting 2017
Session ID : 17a-301-10
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 64
Location : [in Japanese]
Date : March 14, 2017 - March 17, 2017
Impact of NO POA on leakage current conduction mechanism of thermally grown SiO2 for 4H-SiC C-face substrate
*Yuji Kiuchi, Mitsuru Sometani, Dai Okamoto, Tetsuo Hatakeyama, Shinsuke Harada, Hiroshi Yano, Yoshiyuki Yonezawa, Hajime Okumura
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