The 78th JSAP Autumn Meeting 2017
Session ID : 8p-C14-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 78
Location : [in Japanese]
Date : September 05, 2017 - September 08, 2017
O 2p peak evolution and Si valence band change in plasma oxidation of Si(001)
*Kazuho Morita, Sakura Takeda, Tatsuya Ebato, Yudai Higa, Akiho Fujinaka, Natsuki Morimoto, Masatoshi Yoneda, Artoni Kevin R. Ang, Xin Tan, Hiroshi Daimon
Author information
Details
Article 1st page
