The 78th JSAP Autumn Meeting 2017
Session ID : 8p-C14-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 78
Location : [in Japanese]
Date : September 05, 2017 - September 08, 2017
Enhancement of SiO2(001)/Si interfacial oxidation by rapid O2 pressure increase
Details
Article 1st page
