The 78th JSAP Autumn Meeting 2017
Session ID : 7a-A402-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 78
Location : [in Japanese]
Date : September 05, 2017 - September 08, 2017
Active species of hydrofluorocarbon plasma and etch performances of dielectric films - 2
*Naoki Takeda, Yan Zhang, Toshio Hayashi, Makoto Sekine, Hiroki Kondo, Kenji ishikawa, Masaru Hori
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