The 78th JSAP Autumn Meeting 2017
Session ID : 7a-A402-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 78
Location : [in Japanese]
Date : September 05, 2017 - September 08, 2017
Effect of Bias Voltage for Removal of DLC Films by Using Oxygen Plasma
*Yuki Kondo, Itaru Fujita, Satoshi Degai, Tsuyoshi Tanimoto, Toru Harigai, Yoshiyuki Suda, Hirofumi Takikawa, Hidenobu Gonda, Yasuhiro Hadano, Masao Kamiya
Author information
Details
Article 1st page
