The 78th JSAP Autumn Meeting 2017
Session ID : 7a-A402-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 78
Location : [in Japanese]
Date : September 05, 2017 - September 08, 2017
Synthesis process of nano-crystals on Si substrates in etching of CF4/Ar plasmas
Details
Article 1st page
