JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 78th JSAP Autumn Meeting 2017
Session ID : 7p-A402-1
Conference information

Host: The Japan Society of Applied Physics

Name : JSAP Autumn Meeting

Number : 78

Location : [in Japanese]

Date : September 05, 2017 - September 08, 2017

Surface composition analysis of SiN/SiO2 deep holes fabricated by plasma etching
*Taku Iwase, Kazuhiro Karahashi, Satoshi Hamaguchi
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Keywords: 7p-A402-1, plasma, etching, high aspect ratio
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