The 78th JSAP Autumn Meeting 2017
Session ID : 7p-A402-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 78
Location : [in Japanese]
Date : September 05, 2017 - September 08, 2017
Etching characteristics of TPCO using O2/Ar plasma
*Shuya Murakami, Shusuke Yamashita, Shinya Yoneda, Kazuo Takahashi, Takeshi Yamao
Author information
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