JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 78th JSAP Autumn Meeting 2017
Session ID : 6a-A503-12
Conference information

Host: The Japan Society of Applied Physics

Name : JSAP Autumn Meeting

Number : 78

Location : [in Japanese]

Date : September 05, 2017 - September 08, 2017

CO concentration in CZ furnace
*Yoshiji Miyamura, Hirofumi Harada, Satoshi Nakano, Koichi Kakimoto
Author information
Keywords: 6a-A503-12, silicon, CZ, carbon
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© 2017 The Japan Society of Applied Physics
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