JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 65th JSAP Spring Meeting 2018
Session ID : 19p-P6-4
Conference information

Host: The Japan Society of Applied Physics

Name : JSAP Spring Meeting

Number : 65

Location : [in Japanese]

Date : March 17, 2018 - March 20, 2018

Electrical Characteristics and Microstructure for MoSi2-Si Composite Thin Films Deposited by RF Magnetron Sputtering
*Shungo Tanimoto, Yuuki Sato, Tadashi Ohachi, Shinzo Yoshikado
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Keywords: 19p-P6-4, MoSi2-Si Composite Thin Films
CONFERENCE PROCEEDINGS FREE ACCESS

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