The 65th JSAP Spring Meeting 2018
Session ID : 19p-P6-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 65
Location : [in Japanese]
Date : March 17, 2018 - March 20, 2018
Influence of Elements Addition on Crystal Structure of AlN Piezoelectric Thin Film
Saki Tanaka, *Masato Uehara, Sri Ayu Anggraini, Tetsuya Okuyama, Hiroshi Yamada, Morito Akiyama
Author information
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Article 1st page
