The 65th JSAP Spring Meeting 2018
Session ID : 19a-C101-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 65
Location : [in Japanese]
Date : March 17, 2018 - March 20, 2018
SiC Nanodots Formation in Bulk-Si using Hot C+ Ion Implantation Substrate (Ⅲ):C Dose Dependency
Sho Irie, *Masaki Yamamoto, Sinji Nakada, Yusuke Omata, Takashi Aoki, Toshiyuki Sameshima, Tomohisa Mizuno
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