The 65th JSAP Spring Meeting 2018
Session ID : 19a-C101-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 65
Location : [in Japanese]
Date : March 17, 2018 - March 20, 2018
SiC Nanodot Formation in Bulk-Si Substrate using Hot C+ Ion Implantation (Ⅱ): Dependebcy of Ion Implantation Temperature
*Shinji Nakada, Masaki Yamamoto, Sho Irie, Yusuke Omata, Takashi Aoki, Toshiyuki Sameshima, Tomohisa Mizuno
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