The 65th JSAP Spring Meeting 2018
Session ID : 18a-E202-4
Conference information
Host:
The Japan Society of Applied Physics
Name :
JSAP Spring Meeting
Number :
65
Location :
[in Japanese]
Date :
March 17, 2018 - March 20, 2018
Study of showerhead nozzle configuration in vertical HVPE reactor for large size bulk GaN