JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 65th JSAP Spring Meeting 2018
Session ID : 18p-E202-11
Conference information

Host: The Japan Society of Applied Physics

Name : JSAP Spring Meeting

Number : 65

Location : [in Japanese]

Date : March 17, 2018 - March 20, 2018

Deposition of Al1-xGaxN films by sputtering
*Ryo Ishikawa, Junjun Jia, Yuzo Shigesato
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Keywords: 18p-E202-11, aluminum gallium nitride, sputtering, Vegard's law
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