The 65th JSAP Spring Meeting 2018
Session ID : 18p-E202-10
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 65
Location : [in Japanese]
Date : March 17, 2018 - March 20, 2018
Thickness Dependence on Crystalline Quality and Residual Stresses of AlN Films Deposited by Pulsed DC Reactive Sputtering
Details
Article 1st page
