The 65th JSAP Spring Meeting 2018
Session ID : 19p-C202-15
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 65
Location : [in Japanese]
Date : March 17, 2018 - March 20, 2018
Deposition of high-k dielectrics on 2D channel by PO2 controlled thermal evaporation
Keywords:
19p-C202-15,
High-k
Details
Article 1st page
