The 79th JSAP Autumn Meeting 2018
Session ID : 20a-438-10
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 79
Location : [in Japanese]
Date : September 18, 2018 - September 21, 2018
Control of sp2 carbon bonds in amorphous carbon films by formation of precursor radicals depending on a residence time
*Hirotsugu Sugiura, Yasuyuki Ohashi, Lingyun Jia, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Keigo Takeda, Makoto Sekine, Masaru Hori
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